| In order to reduce the 3D angle error of the 2D workbench in work, it is essential to achieve the angle error compensation and improve positioning accuracy. This paper proposes a 3D angle error detection system based on dual DVD structure and an angle compensation method for 2D workbench. This system can achieve the measurement of yaw angle error, pitch angle error and roll angle error of the stage. And the angle error of the stage can be compensated by adjusting the micro platform.The job is done as follows:(1) Mastered the method of measuring tiny angle and analyzed the feasibility about using DVD optical detector to measure the angle;(2) Signal processing circuit, which involved differential amplifier, division circuit and filter circuit, was completely designed;(3) Data acquisition procedure was successfully programmed;(4) The program of the angle error compensation system has been written. The DVD pickup head angle measurement device is used in the system as a detection device. When the work stage’s angle error is bigger than the set value, the high voltage power supply which controlled by DA card drive the PZT to push the stage to move. And finally the angle error of the stage has been successfully compensated.(5)The experimental system has been set up to test the DVD optical pickup angle measurement device and the error compensation system.Elongation and contraction of the piezoelectric ceramic can control the 3D angle motion of micro stage, thus though the movement of the micro stage,3D angle error of the whole workbench can be compensated and corrected. According to experiment results, the 2D angle measurement range using DVD laser head is±110", the average resolution is 0.2", and after compensation, the angle error of the workbench is less than 3". |
PDF Full Text Request