Based On The Electric Field Induced Polymer Rheological Forming Microlens Array Manufacturing Technology Research

The rapid development of micro optical-electronic mechanics system has putforward new requirements for miniaturization of optical elements. The traditionaloptical system can no longer satisfy the requirements of miniaturization system. Thedevelopment in the functional device of micro lens array (MLA) with small size, highdensity offer technical support and guarantee for signal transmission and detection inmicroelectromechanical system, which possesses small volume, light weight and highintegration degree. MLA can divide a same signal source into many sub-populationswithin the scope of small size, which makes amplification and collection of signalspossible at the micrometer dimension. As one of the most important components inμm-optical system, miniaturization and integration of MLA have become an importantresearch direction in the development of micro-electro-mechanical system.(1)In this paper, based on national "973" project of "regularity and control in flowingand forming of nanostructures induced by an external electric field", we propose a newmethod to fabricate MLA of high precision, i.e. MLA technology—flowing andforming of polymer structures induced by an external field, and an in-depthinvestigation on both the mechanism of forming theory and technological process iscarried out. The main work in this thesis is indicated as following:The basic theory about rheological forming of polymer films under the influence of agraphical modulating electric field is concisely analyzed; Through a theoreticalderivation of the dynamic mechanism that takes place in the flowing deformation ofpolymer structures, the physical model for rheological forming of polymer filmsinduced by external field is established, which provides a theoretical basis for theapplication of this field-induced method to fabricate MLA.(2)Based on a commercial software package—COMSOL Multiphysics, whichimplements a finite element analysis, simulation model of the field-induced strategy tofabricate MLA is established, and parameters affecting this forming process areanalyzed. The simulation analyzes the forming process of MLA, primarily from twoaspects: mold structure parameters and experimental parameters (such as the thickness of air gap, voltage, polymer film and dielectric constant and viscosity, etc.). Accordingto the results of simulation, the parameters optimization-analysis provides an importantreference for the field-induced MLA fabrication.(3) The200um、100um and30um diameter micro hole of micro hexagon orcircular arrayed template feature a side wall with the thickness of3um were desingedfor the fabrication of the corresponding microlens arrays. we have researchedexperimeantlly the influence of the technology parameters on the formation of themicrolens arrays electrically-induced by different templates. Finally, a series ofmicrolens arrays with the diameter of30um or100um, and sag height ranging from3to28um was fabricated sucessfully.（4）we characterize the performance of MLA. Specifically, two aspects includingthe morphology feature of unit element of MLA and optical performance of MLA areexamined and verified, respectively.