Research On Numerical Control Processing Technology Of Single-Crystla-Germanium Aspheric Surface

With the continuous development of military optical instruments, the single-crystal-germanium is more and more widely used in the semiconductor industry and the infrared optical system. The requirements of aspheric surface type accuracy and surface roughness is getting higher and higher in order to meet the requirements of the infrared optical precision instruments.According to the requirements of process technology to the Φ26mm single-crystal-germanium lens and Preston theory, we made several experiments with different abrasive wheel size, different axle revolving speed, different feed rate and different polishing accessory. At the same time, technological parameter are optimized. Finally, the technical problems that degree of finish of the single-crystal-germanium aspheric surface can not be satisfied are solved.The single-crystal germanium lens is tested by Taylor Hobson profilometer and Zygo interferometer. The result shows that the single-crystal germanium aspheric surface figure can get0.2μm, the deviation of the center is less than1μm and the degree of finish can be above the grade of the Preston theory. The requirements are satisfied.