| At present, the method of pressure control which is often multi-use the feedback signal of the sensor to control actuators,on the one hand, this method of pressure control accuracy is not high, on the other hand prone overshoot and adjustable timeout.This problem will become more serious When work environment is high pressure and UHP; for the above-described problems, this paper mainly studied the high pressure and UHP control technology in the small cavity. First, analysis the gas flow characteristics based on van der Waals equation.then establish the mathematical model of the cavity inflated and deflated, and designed the mechanical part of the pneumatic system. This article taken the twice pressurized,and the pressure output range is from15to180MPa.In order to achieve the cascade control, when secondary pressurized,this article taken fuzzy adaptive PID, PWM and PLC combination of control, so that precise control the gas mass flow controller charge into the gas in diaphragm compressor and the fine-tune device charge into the gas flow in small cavity.Finally, through modeling and simulation of the control system, obtained better control effects and analysis the error which impact of system control precision, the pressure control accuracy is no more than±0.61MPa. |