Preparation Process Of NanoGetter Based On Vertically Aligned Carbon Nanotubes

In the MEMS technology, vacuum packaging is one of the most signigicant research topic. The necessary condition to obtain and maintain high vacuum degree is good getter technology. CNTs, as framework with advantages of high specific surface area and auto-gettering property, is used to fabricate a high-efficiency, simple-process and low-cost nano getter, but limited by CNTs growth condition, poor adhesion of the basement, susceptibility to pollution. This paper introduces a transfer method for preparing nano getter based on VA-CNTs in order to utilize high specific surface area and of CNTs and overcome the drawbacks during the integration of MEMS devices.This paper mainly focuses on increasing inspiratory flow rate and inspiratory capacity of unit getter area, optimizing the preparation parameters of getter film, such as sputtering power, pressure, time, temperature, etc.,. Research works as following issues:(1) Based on typical getter model, a novel one applied for CNTs nanogetter is proposed to theoretically analyze in detail and achieve inspiratory kinetics figure of VA-CNTs/Ti nanogetter. Compared with Ti film getter, the physical adsorption rate of the VA-CNTs/Ti getter is n (n=S2/Si) times as fast, the diffusion rate of it is m times (m=n(?)d2V(t)dt/(?)nd2V(t)dt, v(t) as the diffusion velocity of Ti film, d2as the thickness of Ti film).(2) Growth mechanism of vertical array CNTs is analyzed and summarized. CVD process parameters is optimizedVA-CNTs is fabricated. Based on nano-glass paste binder, transfer technology of nanogetter is proposed and implemented. The preparation and activation process of VA-CNTs nanogetter is investigated. The optimum parameters for VA-CNTs sputtered Ti show as:8Pa,350W,10min. The optimum conditions for the activation process is600℃and30min.(3) By BET method, the results of specific surface area test of VA-CNTs nano-getter is demonstrate that the specific surface area of VA-CNTs/Ti BET is275.0071m2/g, which proves nano-getter has a high specific surface area.(4) For VA-CNTs nanogetter, by TGA method, the results of inspiratory capacity test of VA-CNTs nanogetter illustrates that VA-CNTs/Ti nanogetter are with inspiratory capacity.