| The two-dimensional positioning device and technology are required higher and higherin modern high-tech fields, such as lithography, ultra-precision measurement andmicrosurgery, IC manufacturing and cell operation. The two-dimensional positioning devicewith high speed and high accuracy is a key technology for the future development in planemotion. Compared with traditional rotary motor with transmission mechanism to activetwo-dimensional motion, the planar motor could directly active two-dimensional planemotion without conversion mechanism. It possesses many advantages such as simple structure,high positioning accuracy and high speed.In this paper, the source, purpose and meaning of the subject are first given, and then, thecurrent situation of the planar motor is summarized. On the basis of discussing the structure,working principle and electromagnetic properties of the Taiwan HIWIN LMSP, several typicalcontrol methods of the planar motor are analyzed and studied. Then, according to LMSPperformance characteristics, the selected motion control card is analyzed in detail. Match theappropriate driver LMDX. The peripheral equipments of the system are configured. And then,the various components interfaces of the control system are designed, the motion controlsystem of planar motor is built.Based on the hardware platform, the software design of the control system is completedby LabVIEW, mainly included the initialization module design, the control module design andthe close system module design. The X, Y axis following error curves are obtained by thepositioning experiments for linear, arc and circular motion. The experimental results showthat the control system possesses good positioning accuracy and stability, satisfy the planarmotor control demand, and achieve the expected technical specifications. |
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