Design And Fabrication Of Binary Optical Elements Based On Transparent Ceramics

Binary optics elements are not only the key components of fabricating micro optoelectronic systems, but also the key components of fabricating micro-optical electromechanical system(MOEMS). Binary optics elements have small size, light weight and low cost. They can fulfill new functions which are difficult for the ordinary optical elements, such as micro-size, arrays, integration, imaging, transformation and so on. Nowadays, following the rapid development of the science and technology, binary optics elements play more and more important role in various application areas. There are higher requirements on the process and applicatio n of binary optics elements.Because of superior physical and chemical properties, excellent optical characteristics, transparent ceramics, a research hotspot in materials field, has wide application prospects.This paper presents the research work focusing on various optionality of materials, one of advantages of binary optics elements. This paper is trying to fabricate binary optics elements by using transparent ceramics as base materials. Silicon wafer, metal and glass are ordinary base materials. These materials have advantages. Their deficiencies are also exposed in daily use. Transparent ceramics have the characteristics of acid-resistant, alkali-resistance, heat resistance, high strength, and high transmittance in a multi-band and broad-spectrum area. Even in the far infrared region, there is 80% linear transmittance. Using transparent ceramics as base materials enable the elements work in more complex environment. It also enlarges the application range.Given the characteristics of transparent ceramics, this paper is researched by “addition” scheme and “subtraction” scheme. In “addition” scheme, given the nature of transparent ceramics, coupled with “addition” processing in lithography, a uniform dense metal film is deposited on transparent ceramics by magnetron sputtering coating technology. Metal film is integrated with transparent ceramics. Element is embedded in the metal film by digital microlithography technology and Contact- mode photolithography technology. Such binary optics elements are able to function normally. ”Subtraction” scheme is for exploration. Transparent ceramics have been etched by ICP etching system and the metal film as a hard mask. In addition, binary optics elements are obtained by the ablation process of transparent ceramics with femtosecond laser system.The experiments are made on several binary optics elements. The basic elements involve one-dimensional grating, orthogonal grating, dammann grating, square zone plate, Fresnel zone plate and so on. The self-designed elements include binary computer-generated holograms and vortex beams. The feasibility of fabricating binary optical element based on transparent ceramics has been validated in this paper. The experiment results have been analyzed by optical profiler and microscope. The diffraction patterns of samples have been reconstructed.