The Study Of TiN Coatings Deposited By Plasma Enhanced Balanced Magnetron Sputtering

In this thesis, coatings of aluminum nitride and titanium nitride are deposited by plasma enhanced balanced magnetron sputtering technique.In the experiments of deposited AlN coatings, the curve of target voltage along with flow of N2 is used to analysis the phenomenon of target poisoning. The mechanism of target poisoning is studied with measures including the composition and resistivity of coatings.In the depositing experiments of TiN coatings, we study the effect of plasma enhanced on structures and properties of coatings. The thickness, crystal phase, microstructure, composition, hardness, wear-resistant and adhesion between coatings and substrate are investigated systematically by Surface profiler, XRD, SEM, EDS, Webster hardness gage, Dry sliding experiments, Scratching tester. Furthermore, we research the relation between depositing parameters and TiN coatings structures and properties.The preferred orientation of TiN coatings with B1-NaCl-type structure is relevant to the surface and strain energies. At lower coating thickness, the surface energy controls coatings growth and a {100} preferred orientation is expected; At larger coatings thickness, the strain energy predominates and a {111} preferred orientation is expected.The TiN coating deposited with a low plasma enhanced action has the obvious {111} preferred orientation. With the increase of plasma enhanced action, the effect of argon ion bombardment is enhanced. Moreover, the morphology of the TiN coating transforms from triangular pyramid to spherical. The {111} preferred orientation becomes weak with the increase of TiN coatings strain.The nitrogen ion concentration of the target surface increase with the increase of nitrogen flow rate of unit target current. The target surface is easy to be deposited a layer of nitride which leads to the decrease of the energy of deposited particles. Furthermore, with the decrease of the migration energy of deposited particles on coatings surface, the morphology of the triangular pyramid structure can be easily formed, and the density and hardness of TiN coatings decrease and the friction coefficient increases.