Preparation Of The Pzt-based Piezoelectric Ceramic Andapplication In The Acceleration Sensor

The discovery of PZT ceramics is an important turning point in the development of piezoelectric ceramics. PZT piezoelectric ceramics have good piezoelectric performance, so they are often used to make piezoelectric devices, such as sensors and transformers. In this thesis, the preparation, properties of piezoelectric ceramic and the application in the piezoelectric acceleration sensor are studied. The piezoelectric acceleration sensor has many advantages, such as small volume, light weight, wide frequency band, high sensitivity, strong anti-interference ability, good environmental characteristics and easy installation. The property of piezoelectric ceramics is very important for piezoelectric acceleration sensor.0.02Pb(Sb_0.5Nb_0.5)O3-0.98Pb_1-2xBa_xSr_x(Zr_0.53Ti0.47)O3 piezoelectric ceramics（where x=0.02, 0.03, 0.04, 0.05） and Pb0.95La0.05ZrxTi1-x+0.6%Nb₂O₅ piezoelectric ceramics（where x=0.53, 0.55, 0.57, 0.59） material are prepared by using the conventional solid-phase sintering and the piezoelectric ceramics are characterized by XRD and SEM. The influence of different Ba, Sr doping content and sintering temperature on the piezoelectric ceramic properties are investigated by the first formula and the influence of different Zr/Ti ratio and sintering temperature on the piezoelectric ceramic properties are investigated by the second formula. The results show that:（1） 0.02Pb(Sb_0.5Nb_0.5)O₃-0.98Pb_1-2xBa_xSr_x(Zr_0.53Ti0.47)O₃ piezoelectric ceramic displays good combination properties under the Ba, Sr doping content x=0.04 and the sintering temperature of 1260 ℃. Piezoelectric constant d33=615 pC/N, the relative dielectric constant ε33/ε0=2224, dielectric loss tanδ=2.11%.（2） Pb_0.95La_0.05ZrxTi_1-x+0.6%Nb₂O₅ piezoelectric ceramic exhibits good combination properties under the Zr/Ti=55/45 and the sintering temperature of 1260 ℃. Piezoelectric constant d33=577 pC/N, the relative dielectric constant ε33/ε0=2286, dielectric loss tanδ=1.41%.when the above-mentioned two piezoelectric materials are applied in center compression type piezoelectric acceleration sensor, No.1 and 2 are used to represent, respectively. Property tests show that : the respective charge sensitivity of the sensors is K₁=2.72pC/m·s-2 and K2=2.61pC/m·s-2; the respective maximum transverse sensitivity ratio is K_<sub>max1=4.46%<5% and K2max=4.5%<5%; the respective maximum linearity error is δ_<sub>max1=2.97% and δ₂max=3.02%; the respective maximum temperature response deviation is σ₁=3.82% and σ2=4.21%; the respective maximum humidity response deviation is α1=3.71% and α2=4.25%; repeatability and hysteresis characteristics are also quite good and respective repeatability error is R₁=3.71% and R₂=3.74%; respective hysteresis error is δ_H1=2.21% and δ_H2=2.6%. Besides, testing charge sensitivity of the sensor and maximum transverse sensitivity ratio for a long period of time and the results show that: two types of piezoelectric acceleration sensors have good long-term stability, respective instability of sensor charge sensitivity is 1.43% and 1.92% and respective instability of the maximum transverse sensitivity ratio is 4.48% and 4.67%. The result is comply with the operating requirements of the common vibration test sensor.