The Research Of Air-Suspension Platform Based On LabVIEW And Input Shaping For Vibration Reduction

Air-Suspension motion system has broad application prospects in the field of non-contact transmission of glass substrate and high-speed and high-acceleration precision machining equipment of IC manufacturing.The Air-Suspension motion system has the advantages of no wear.long life,no pollution,high speedjow friction and high precision.But,compared to conventional linear rail,the factors such as low bearing capacity,complex supporting structure,low gas film stiffness and low damping put forward higher requirements to the design and development of the Air-Suspension motion control system.Disadvantages of significant residual vibration,a long time of positioning and stability,susceptibale to interference easy to appear in the motion control process.In particular,the residual vibration produced in the high dynamic (high-speed and high-acceleration) work is obvious,it brings great challenge to the control system to realize fast and accurate positioning control.It is one of the key problems in the control of Air-Suspension motion to rapidly and effectively suppress the residual vibration under high dynamic work.The input shaping algorithm has achieved good results in the suppression of the residual vibration of the flexibale organization system,but the application is still relatively small in the motor servo system.This thesis will explore to suppress the residual vibration of the servo system by using the input shaping algorithm,so as to realize the fast and accurate positioning control of the Air-Suspension motion system.The main research contents of this thesis are as follows:(1)Designing a kind of vibration signal data acquisition and analysis system.The experimental research on the Air-Suspension platform which is used as the research object.Realizing the capabilities of the vibration signal acquisition,display,analysis,reading and storage.Providing reliable data for the further use of the input shaping algorithm to suppress the residual vibration of the Air-Suspension motion system.The system uses the powerful data acquisition function of LabVIEW and the wavelet analysis toolbox of Matlab to realize the wavelet de-noising of the vibration signal.Combining LabVIEW and Matlab to carry out engineering practice which enhanced the processing ability of LabVIEW;(2)The algorithm and realization of fast vibration suppression control is based on input shaping design.Analysis and design methods of four basic input shaping and a modified negative input shaping are introduced in detail.It focuses on the design of input shaping algorithm based on limited time laplace transform and the optimized design of input shaping based on the minimum jerk;(3)The simulation and experiment are carried out on the Air-Suspension motion system by building the test-bed of software and hardware.The main hardware devices using piezoelectric accelerometer,signal conditioner,data acquisition card and computer,etc.The software mainly using LabVIEW to carry on the programming,including signal acquisition module and processing module.The input shaping module is used as an off-line algorithm to access a fast and accurate positioning controller of the Air-Suspension motion system based on Matlab/Simulink.Simulation and experiment are carried out on the Air-Suspension vibration suppression system of the design of input shaping algorithm based on limited time laplace transform and the optimized design of input shaping based on the minimum jerk,and analyzing by comparing with system response of other input.Experimental results show that the displacement response time is reduced to 80%,and the steady state time is reduced to 37.5% of the later.The input shaping method can achieve the goal of fast and accurate positioning on the basis of ensuring the response performance of the system.