Two-photon Polymerization Processing System Error Identification And The Influence Of Voxel Position And Orientation

Two-photon polymerization processing technology can realize large area metamaterials fast structured processing, which is one of the effective processing methods of micro-nano devices. Recently it has been widely concerned in the aviation electronics, medical equipment, sensor technology and other fields. The error in the two-photon polymerization processing system is one of the important factors that affect the machining precision. System error identification and analysis of the influence of system error on position and orientation are an important prerequisite for realizing error compensation, correcting the position and orientation and improving the machining accuracy.This paper was based on the two-photon polymerization processing system which built by the research group, and analysed the system error of each component of the processing system and the main source of the error term. It is known that the geometric error of the system is the biggest influence on the machining accuracy. In order to realize the system error identification and establish analysis relationship which has influence of the system error on the position and orientation. Specific research situation is as follows:(1) Build the kinematic chain model from the main light focus to expected position of sample material internal by using multi-body system theory. Simplify the system main components and analyze the change of characteristic transformation matrix between two adjacent bodies under ideal conditions and with error. Further evolved into each feature, finally establish the geometric error model of two-photon polymerization processing system.(2) Set up the experimental measurement system and measure the geometric error of the micro table, including the positioning error and straightness error, and then identify other geometric parameters by using improved the nine-line identification method, and the geometric error parameters of the machining system are obtained.(3) Establish the mathematical model of the solidification point voxel of the two-photon polymerization process. Combined with the system processing parameters for analysis, reveal the effect law of movement error of motion axes and rotation error for the formative position and orientation of voxel, and then establish the mapping relation from the translational error of axis system and rotation error to position and orientation of voxel.