Fabrication And Investigation Of Ion-sensitive Sensor Based On Self-assembled Carbon Nanotube Film

In recent years, food, medicine, the environment and other accidents are common. The ion detection has extensive contacts with food processing, medicine safety, environmental protection, etc. The ion-sensitive sensors based on carbon nanotubes(CNTs) and micro-nano manufacturing technology have become an important research direction of the ion detector, such sensors have the characteristics of small size, low power consumption, high sensitivity, fast response and can be detected at room temperature.This paper aims to develop high-sensitivity ion sensors. Interdigitated and window electrode structure patterns fabricated on a flexible polymer substrate using micromachining MEMS technology and then used self-assembled layer by layer(LbL) technique to assemble carbon nanotube film on the substrate electrode and last built a self-assembled carbon nanotube thin film sensors. Using SEM, XRD, RS technology for carbon nanotube thin film characterization analysis revealed the morphology and film structures. On the basis of experimental platform and CNTs thin film sensor, the experimental tests of the I-V characteristic curve, sensitivity and detection precision of pH, hydrogen peroxide, glucose at diffident concentrations using chronoamperometry method carried out and compared the performance of diffient type electrode pattern structure sensors. At last, this paper revealed the detection sensitivity characteristics and mechanism of pH, hydrogen peroxide, glucosea based on CNTs thin film sensors.This paper studied a high sensitivity, low cost, high performance ion detection sensor, which provides an experimental and theoretical basis for the protection of industrial security, human health and the environment from pollution and has important scientific significance and research value.