Hard Film Performance Research And Industrial Application

This paper summarizes the recent research of hard films, two typical hard films nitride films and Diamond Like Carbon (DLC) film are mainly analyzed. Latest research progress and existing main problems are discussed in detail, which leads out the topic of this article. In order to get TiA1VN films and metal doped DLC films, the reaction magnetron sputtering technology was used, when preparing the TiAlVN and DLC films, the nitrogen and methane were used as the source. The main research work around three aspects:(1) For TiAlVN films structure, mechanical properties and electrochemical corrosion resistance were analyzed. (2) The structure of Zr/Ti double metal doped DLC films and ability of tribological properties were analyzed. (3) Tribological behavior of Zr/Ti with double metal doped DLC film under different medium and high pressure common rail injection system coating plunger bench test. The main results are as follows:(1) TiAlVN films were produced by using the reaction magnetron sputtering technology for Tc4 (Ti-6A1-4V) as target material. Using scanning electron microscope, Nano pumped and X-ray photoelectron spectroscopy, the films section morphology, mechanical properties such as N elements and electrochemical corrosion performance were studied, respectively. Through the study on its’structure, we found that the films were columnar growth and grew stronger when the flowing speed of N2 increased. The electrochemical corrosion resistance of the films was test in sodium chloride solution of 0.5 moles per liter by using Autolab type3 electrochemical workstation. It shows that the TiAlVN films have extremely lower corrosion current and better electrochemical corrosion resistance compared with TiN films.(2) The different Zr/Ti contents double doped DLC films were prepared by combining reactive magnetron sputtering with arc ion plating, Dispersive spectrum (EDS), Raman spectroscopy (Raman), Nano pressure into the instrument, the high speed reciprocating friction and wear testing machine and 3d contour meter were used to study film composition, structure, friction and wear performance, respectively. The results show that the film hardness are down a bit because of the doped metal, the highest hardness value is 39.7 GPa. The friction test shows that the films has good tribological performance that the friction coefficient is only 0.048, and finds the friction coefficient increases with contain of Ti decreasing. The films show good wear resistance when analyzed by three-dimensional contours of grinding crack.(3) Friction and wear performance and film adhesion of the Zr/Ti double doped DLC films were tested by using the reciprocating friction and wear tester, scratch and indentation method. It turns out that the films have excellent wear resistance under the atmospheric environment and the different oil medium. At the same time, the binding force was HF1, which can satisfy the need of industry well. After 1250 hours bench test, whether the clearance among plunger matching parts or the parameters of high pressure common rail injection system changed a little. The surface of coating plunger was found no obvious scratches which could satisfy the industrial application.