The Preparation Of Graphene Films And Optimize Their Tribology Performance

Graphene as a kind of allotropes of carbon atoms with typically two-dimensional crystal layer structure, gives priority to with SP2 hybridization. The special two-dimensional structure endows its excellent physical and chemical properties, and therefore has attracted the hot attention to many scholars, is of great theoretical research and practical application of double meaning. Meanwhile, as a thin solid lubricating film, graphene has excellent lubricating performance. However, Compared to other soild lubrication, there are many shortcomings as a soild lubrication, such as the costs are expensive and lubrication performance is not stable. To solve above problems, this paper has carried out a series of research work step by step, the main research work is as follows:1.The graphene films were deposited by the plasma enhanced chemical vapor deposition(PECVD) method under the prheated(600℃) environment. The microstructure of thin films have a great change with the temperature increasing for carbon films, which presents the typically structure of amorphous carbon at room temperature(20℃), and shows long range and orderly graphene structure at temperature(600℃). The mechanical properties and friction properties were studied at the relative humidity 40% environment.The result shows that orderly graphene films with good lubrication properties, expecially in the humid air, friction coefficient can as low as 0.03.2.The layered structure of Graphene/Mo S2 thin films were deposited by the combination technology of plasma enhanced chemical vapor deposition(PECVD) and magnetron sputtering. Studies have shown that this composite layer structure grants the films better mechanical properties and excellent friction performance at the relative humidity 35%. Specifically, the composited films show the super lubrication performance in multi atmosphere environment(Air, N2, Ar, O2), the friction coefficient of graphene/Mo S2 film is 0.008 in air.3.In view of the fact that graphene oxide thin film with high friction coefficient, the lasering surface texture technology was carried out optimizing the lubrication performance. The effect of micro-scale surface texture with different densities on wear resistance of graphene oxide(GO) films was studied using a reciprocating ball-on-flat tribometer in humid environments. The micro-scale surface texture was produced by depositing about 230 nm thick GO films onto silicon substrates pre-textured with the patterns of dimples. The experimental results demonstrated excellent ability of the textured films to improve wear resistance of silicon Substrate. Futhermore,compare the GO films with higher friction coefficient(0.095), the GO films with appropriate dimple area density(4%) were effective in enhancing reducing-friction property(0.024).4.The multilayer fullerene-like hydrogenated carbon(FL-C:H) films were deposited by pulse plasma enhanced chemical vapor deposition. The results show that the films deposited by proper cycle ratio and number of layers have excellent mechanical properties and tribological properties. Such as, the film has an excellent elastic recovery value of 90% and a lower friction coefficient(0.019) and wear rate(3.0×10-9 mm3/Nm).