A Study On Synchronous Test Technique For Mechanical Properties Of Film/substrate System

Thin film is widely used in many advanced techniques. Structural stability,reliability and durability need a better understanding to the mechanical behavior of thethin layer structure, therefore it is necessary to characterize the young’s elastic modulus,poisson’s ratio of the thin film and characterize the adhesion strength of film/substrateinterface. Existing test theories usually require prior assuming the poisson’s ratio (oryoung’s modulus) of the film as a known parameter, then they can find some methods todetermine the other parameters. However, as we know, temperature, humidity, etchingmethod, processing conditions and manufacturing process, are likely to cause the largedifferences of the mechanical properties of thin film. So, the use of previous test data(such as poisson’s ratio) for this experiment is error, and the error will impact themeasurement of the young’s elastic modulus, the adhesion strength of film/substrateinterface in this experiments. So, this thesis is committed to acquire the young’s elasticmodulus, poisson’s ratio of the coating film, and the adhesion strength of film/substrateinterface information at the same time through a test data analysis of an experimentalsample. The meathod is called as synchronous test technique.The thesis mainly consists of the following seven chapters:The first chapter mainly introduced the problem introduction and the researchsignificance and expounded the research status at home and abroad, the main researchobjective, research content and innovation.The second chapter introduced the basic theory of circular thin plate problems,which is neccessary for this thesis’s reseach.The third chapter mainly introduces the existing test technique for mechanicalproperties of film/substrate system.The fourth chapter put forward a new synchronous test technique for mechanicalproperties of film/substrate system, this technique can obtain the coating film young’selastic modulus, poisson’s ratio, and the film/substrate interfacial adhesion strength atthe same time by the analysis of one experimental data.The fifth chapter analyzed the advantages of the new synchronous test techniqueby this theis, and compared the new synchronous test technique with the existing testtechnique. The sixth chapter introduced a confirmatory experiment by the author. Verify thecorrectness of the theoretical results in this thesis through the contrastive analysis of theexperimental results with the theoretical results,The seventh chapter summarizes the main research results, and prospects the futureresearch direction.This thesis put forward a new synchronous test technique for mechanical propertiesof film/substrate system. Through the analysis of one test data, the technique can get thesurface properties of the coating film (elastic modulus and poisson’s ratio) and thefilm/substrate interfacial properties (adhesion strength) at the same time. This is themain innovation work of this thesis. The research work of this thesis has definiteapplication values to improve the test precision for mechanical properties offilm/substrate system.