Research On The Technology Of Nanostructure Machining By SPM Probe Combined With Laser

With the development of modern technology, the manufacturing sectorexperienced a journey from the traditional to the special processing and then to thenanometer-manufacturing technology. As a kind of manufacturing technology whichcan achieve nanoscale, more and more researchers put their attention on it. So weput forward a new technology to gain nanostructure: Nanostructure machining bySPM probe combine with laser. For this technology, our study is on the theoreticalanalysis, simulation and experiment.When the optical fiber probe guides the laser to irradiate on AFM probe, thesurface of AFM probe tip can produce Surface Plasmon Polaritons(SPP). And theSPP will give a enhancement to the electric field on the AFM probe tip in awavelength range. This phenomenon is called near-field enhancement effect. Westart the research on the mechanism of near-field enhancement effect firstly. Thenwe do the simulation on three points: electric, temperature field and thermalexpansion. Using the software Comsol to study the near-field enhancement, and thiswork will provide a theoretical guarantee for follow-up experiment.Carrying out a test methods of temperature field based on AFM distance-forcecurve and nano-indentation. We use three kinds of materials as the substrate, andthen the optical fiber probe guides the laser to irradiate on AFM probe to bringnear-field enhancement on the tip. The material under the tip would be influencedby the temperature field, so we can estimate the temperature of probe tip bydistinguishing the material surface state. At the same time we can define therangement of parameters for the next nanostructure machining experiment.Developing the experiment research on these four parameters: laser energy E,the time t, the force F and the distance between probe tip and substrate L. At thebeginning we give the standard of how to evaluate the quality of nanostructure, andthen probe the law how these parameters influence the experiment result. At last wesummarize the best parameters for nanostructure machining. Additionally, wecompare the differences between this new technology and traditional mechanicalcharacterization of AFM probe.Our study is significant that it provides the basis and reference for using theoptical fiber probe guides a low power continuous laser to irradiate on AFM probeto machining nanostructure.