Simulation And Experimental Study On Nano-Lithography Depth By AFM Miro Probe

Atomic force microscope (AFM) has been applied in the field of nano-machining since its invention even its main function falls in the inspection of surface topography and other features. In recent years, AFM-based nano-structure machining on different materials has been drawing more and more attention and is being developed as one of AFM's main applications. So the study for the AFM-based nano-scratching technology is important to both the basic theory and improving the machining technology with AFM.Analyzing the present status of nano-structure machining, we find the main barrier to the three-dimensional nano-structure machining is the lack of the systemic thesis on machining depth.The micro-machining by micro probe can be divided into two processes: indentation and scratching. As to scratching, there are three modes: height mode, deflection mode and depth control. In this thesis, the nano-indentation theory is used to obtain the relation between depth and Z displacement of micro positioning stage. The variables which affect machining depth, such as the shape of tip, material properties and micro lever are studied. Then indentation test is used to validate previous formula. The finite element method is used to analysis all these three modes. Then the micromachining system with depth control is consummated. And simulation is verified. Beneath deflection mode, the effects of velocity, feed, machining direction and the load effects of both modes is studied by experiment.