Research On The Mems Sensing Structures Analysis And Optimization

MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and mechanical components in the scale of microns. Due to its small size, low cost, low power consμmption and high efficiency, MEMS technology has been widely used in many fields.The single micro resonator is one of the most classical MEMS structures. Because it can transfer the mechanical energy to others styles and it has a large amplitude in the range of1KHz-1MHz, it has been used in many devices, like automobile safety airbag, microphone, mobile phone, satellite etc.. Then it is important to research the design and optimization technology of micro resonator to the development of the MEMS.This article starts with the micro resonator’s and micro filter working principle, its structures analysis and optimization, the influence of slide film damping on the comb micro resonator’s dynamic characteristic. It aim at setting up and improving the MEMS sensing structures optimization scheme by the research on the micro resonator’s optimization skills.In the working principle part, it includes the analysis of the micro resonator structures, the principle of electrostatic actuation and the kinetic principle. It’s a solid foundation for the dynamic analysis and building the MATLAB analysis program for the series of micro resonator parts.The micro resonator structure optimization research is based on its structure parameterization. The relations between structure parameters and natural frequency are got from ANSYS Workbench, which give a basis for the parametric objective optimization. The natural frequency, its mode of vibration, the amplitude-frequency curve and the phase-frequency curve can be obtained by the modal analysis and the harmonic response. In order to research the dynamic characteristics of a comb micro-resonator vibrates with air resistance, e.g. amplitude, frequency etc. This way makes a program by ANASYS parametric design language APDL. In the program the structure was built as a mass point with area, the air resistance is set by FLUID139element type, the comb fingers are set by TRANS126element, and then calculate the model analysis and harmonic response. Comparison between model trial values and theoretical values shows that this method is reasonable. Compared with others, this method is practical, fast and adaptable.Based on the micro resonator structure analysis and optimization research, I apply it to the micro filter structure analysis and optimization. Compared with the optimized dynamic characteristic curve, it gets a better appearance.A micro resonator and a filter are taken as examples to research how to improve the design and optimization technology. In the end of the thesis a improved strategy is given, and it works in the double filter’s optimization. But it is still limited. The research in this field should be going on.