A Study On Robust Design Of Comb MEMS Drives

MEMS drivers with comb teeth based on MEMS(Micro Electro Mechanical System)technology have good application value in spectral analysis,optical sensor and optical communication.However,the MEMS driver will be affected by many factors in manufacturing process,such as the preparation environment,process error,equipment error and so on.At the same time,the size of MEMS devices is generally in the micron level,so a small deviation will also cause a relatively large impact on its quality characteristics.The robust design can consider the variation brought by noise factors.It’s a kind of engineering design method that can keep its own performance fluctuation small when the product is affected by external noise factors.Therefore,it is meaningful to introduce robust design method in the design process of comb MEMS driver.In this paper,based on the structural analysis and optimization design of comb MEMS driver,two kinds of robust design mathematical models based on stochastic model and tolerance model are established by analyzing the influence of noise factors.After writing algorithms and other steps,two groups of robust design solutions are obtained.Finally,the results of optimization design and two robust design results are verified by ANSYS simulation analysis,which shows that the optimization design method and robust design method used in this paper are reasonable to solve the driver results.In this paper,the optimization design,robust design based on random model,robust design based on tolerance model and simulation analysis of the comb MEMS driver and other research work,the obtained results are compared with the original scheme,the results show that it is feasible to introduce the robust design method into the design process of the comb MEMS driver.The robust design method can not only improve the displacement performance of the comb MEMS driver,but also ensure the robustness of the driver and reduce the production cost of the MEMS driver,which provides a new idea for the optimization of MEMS driver.