Research Of Nano-positioning Method Based On Heterodyne Interferometry

With the rapid development of science and technology, thenano-positioning technology has been widely used in the important researchfield of electronic, mechanical, biological, materials. At the same time, thedevelopment in industry is asking for higher accuracy in displacementmeasurement, so that the nano-positioning technology has better performance,such as higher resolution, measurement accuracy and greater range direction.Recently, the nano-positioning systems use a laser interferometer as adisplacement measurement unit, the piezoelectric ceramics as displacementgenerator. The main problems of such constraints to improve the accuracy ofthe positioning system are: First, nonlinearity and creep properties ofpiezoelectric ceramics to improve the accuracy of the system; Second, thenonlinear optical properties of the interferometer. In this paper, we built thefoundation heterodyne interferometry on nano-positioning systems,quantization the errors for each source system, and proposed to suppressoptical nonlinearity errors and creep properties of piezoelectric ceramicsmethods.The main works of this paper are:(1)We design the nano positioning system based on optical heterodyneinterferometer, used LabVIEW graphical programming language to developthe nanoetric measurement system. Under the premise of ensuring high-speedprecision, achieve nanometer resolution displacement measurements online.(2) A large number of measurements was taken based on the positioningsystem, we analyze the piezoelectric ceramic driving characteristics,proposed a method to reduce the piezoelectric ceramic creep. We analyze themain error sources studied mechanical error, environmental error, opticalerrors by measuring the data.(3) Proposed use of rotating half-wave plate method to suppress optical heterodyne interferometer nonlinearity error, and the suppression methodwith experimental verification.(4) Propose an improved method for system problems. Finally, theimpact proposed a phase control nano-positioning heterodyne interferometerin order to avoid the mechanical properties of piezoelectric ceramics.