| The magnetic suspension actuator is the technology that the magnetic force produced bythe electricity electromagnet and magnetizer for driving force is used to drive object. It hasmany advantages, which is that it has no mechanical contact friction, does not produce dust,does not need lubrication, has fast response, the attraction has wide adjustable range, itsstructure is simple, and so on. Furthermore, the magnetic suspension drive technology wasapplied to industry and other related fields, which has very important significance for thedevelopment of industry and other related fields.In this paper, we study a kind of electromagnetic actuator used on laser cutting head. Inthe vertical direction, it support the suspension parts with the permanent magnet supportproduced by the annular permanent magnets and rectangular permanent magnets. In thehorizontal direction, through differential control of driving force between each pair ofelectromagnets, it overcomes the permanent magnetic interference and drive the suspendedpart. It combines permanent magnetic suspension technology and electromagnetic drivetechnology effectively, and makes full use of their advantages and disadvantages. Furthermore,It adjusts the position of laser beam’s focus.It analyzes the magnetic flux density by the finite element analysis. That is about thesingle suspended part, the suspension parts and support parts in the different position, and thesuspension parts, support parts and drive parts in the different position in the actuator. Theanalysis results show that the magnetic fields produced by permanent magnets have littleimpact on the electromagnet in the process that electromagnetic drive control suspension part.It can be negligible. By the simulation method of the permanent magnet support force in thevertical direction and permanent magnetic interference force in the horizontal direction, andthe theoretical analysis and experimental verification of electromagnetic driving force, itdetermines the air gap distance of the actuator in the horizontal direction and vertical direction.According to the mathematical model of electromagnetic driving force and Lagrangeprinciple, it builds the dynamic model of3-DOF electromagnetic actuator and simulationmodel of control system. Furthermore, the control system is simulation and experimentalanalyzed. That verifies the dynamic characteristic of system. The analysis results show that thesystem has good dynamic characteristic. |