Research And Development On The New Smart Micro-displement Active Vibration Isolation System

The micro-displacement active vibration isolation system has been widely used inthe precision instruments and micro-nano equipment active vibration isolation. Basedon NI PXI data acquisition system and BK vibration exciter, a new smartmicro-displacement active vibration isolation system is presented in this paper, which isconsisting of the PZT actuator, sensor and controller. The hardware experiment platformfor micro-displacement active vibration isolation control system is built in detail. Theprinciples of active noise control technology are applied to the active vibration control.The data acquisition and F-XLMS control algorithm program are developed by theLabVIEW. The simulation analysis and experiment research are respectively carried outby sine, sweep and random excitation signals. No matter what the excitation signal is,the simulation and experimental results are in good agreement with each other. Themain innovations are listed as following.1) A new smart micro-displacement active vibration isolation system whichconsists of the PZT actuator, sensor and controller is presented in this paper. The systemis completely closed-loop control system with high control precision, response speedand stability.2) The vibration isolation theoretical model of multilayer piezoelectric actuator isestablished in detail and the actuator deformation formula along the thickness directionis derived according to piezoelectric equation.3) The control theory and algorithms suitable for micro-displacement activevibration isolation are explored and the F-XLMS algorithm of active noise controltechnology is applied to the active vibration control system. The data acquisition andF-XLMS control algorithm program are developed by the LabVIEW, which providesoftware support for micro-displacement active vibration isolation system.4) The hardware experiment platform for micro-displacement active vibrationisolation control system is built in detail. The BK vibration exciter provide primaryexcitation signal for this hardware platform. NI PXI system collects primary and controlled vibration signal, and then outputs the control voltage. The experimentplatform provides hardware support for micro-displacement active vibration isolationsystem.5) The simulation analysis and experiment research are carried out by sine, sweepand random excitation signals, respectively. No matter what the excitation signal is, asignificant displacement reduction signal can be obtained，which verifies the validity ofthe micro-displacement active vibration isolation system. This investigation will providean important theoretical foundation for the micro-displacement active vibration isolationsystem designing of precision instruments and micro-nano equipment.