Research And Manufacture Of Micro-Spectrometer

Spectrometer, as a kind of analysis tools in light of optical dispersion principle, is widely used to analyze the structure of light and matter. Traditional spectrometer is bulky and expensive that limits its application. The miniaturization research of the spectrometer has become an important development direction. In this paper, a micro-Spectrometer has been fabricated which works in range of 400nm to 1000nm wavelength and presents a 2nm wavelength resolution. The main work is as follows:1)The cross asymmetric structure of modified Czerny-Turner was chosen as optimal optical structure after comparing with each structure of spectral instruments. In our system, the SMA905 was served as input connector, and linear CCD with type of TCD1208 was used as detector, and USB2.0 was used to transfer data. Then the optic structure optimization and tolerance analyses were all conducted in ZEMAX software by monitoring the spot diagram. The results showed that the full spectrum resolution of optical spectrometer reached to 2nm.2) Tolerance analysis of the optical design is very important,which is to analyzing the effects of various parameters on the optical imaging. The result is the collimating mirror meridian angle axial position deviation and the imaging lens deviation will cause a certain impact on the imaging system. The paper designs each parts of instrument and guarantees the stability of the system according the tolerance analysis. Then thesis completes processing, assembling and modulating. The full dimensions of mechanical are 188mm* 128mm* 70mm.3) we should analysis the source of the overall instrument stray light by using the TracePro software, The stray light mainly from the direct scattering light of optical element and the multiple reflection light inside the system mechanical structure. To eliminate the stray light by adding shading device and black surface by anodic oxidation.4) The elements was completed assembling and modulating. And the least squares was used to calibratingthe relation between wavelength and pixel. After comparethe measurement results of standarded spectrometer with home-made spectrometer, which works in range of 400nm to 1000nm wavelength. The result showed that the home-made spectrometer can distinguish 2nm in full spectrum.