Development Of A Multifunctional Combined Probe System For Scanning Probe Microscope

Nowadays, scanning probe microscope (SPM) is a widely used surface analysis instrument. SPM not only services for fundamental research fields in physistry, chemistry and biology, but also becomes more and more important in the area of micro-manufacture and microelectronics. However, the current commercial SPM can only work in a single-probe mode, and its scanning efficiency is quite low, which restrictes greatly its applications. For example, under a special condition (such as vacuum or irradiation environment) for microwear test, it is necessary to replace the relative blunt tip for scratching with a small tip after wear tests for in-situ characteristics of the surface wear area. In particular, the experimental environment will be broken during the process of tip exchange, and the sample will be exposed in the air for a certain time, resulting oxidation and electrochemical reaction or surface contamination of the scratched area. Therefore, it is necessary to develop a multi-function probe system for scanning probe microscope, which can be used in the special environment test to realize the cooperative detection.Based on the above requirements, a manual driven of a multifunctional probe system was developed in a scanning probe microscope (SPI3800N, Seiko Corporation, Japan) for in-situ detection with low cost, high efficiency and good stability. A preliminary design scheme was proposed for a higher probe positioning accuracy and higher degree of automation of the integrated Raman spectra technology in a multifunctional combined probe system. The main work and innovation points could be summarized as below.(1) A manual drive multifunctional combined probe system for in-situ detection was developed with the advantages of low cost, high efficiency and good stability. Good matching between the multifunctional probe system and AFM equipment was realized through the high-precision positioning platform, probe support structure, optical window and seal system. As a rusult, a manual drive multifunctional combined probe system for situ detection was designed and fabricated.(2) A large scale temperature measuring system was designed and fabricated using for long distance and complex structure in vacuum chamber. Based on the special structure of AFM chamber (SPI3800N), the platinum thermal resistance sensor and XMT806 intelligent PID temperature control instrument were selected for the measurine system. The three-wire method was used to eliminate the measurement error caused by the self-resistance of the conductor. This system is suitable for low and medium vacuum environment, and it has the advantages of simple structure, accurate measurement, low cost and so on.(3) In order to realize the combination of scanning probe technique and micro-Raman technique, a preliminary structure was proposed for automatic measurement. According to the requirements of this equipment, a platform for probe positioning was designed using an appropriate piezoelectric positioner and a driving disc. Furthermore, two kinds of multi-function combined probe system, i.e., "external" and "built-in" mode of the Raman objective, were proposed for a flexible meamurement.The development of the above equipment will be beneficial for enhancing the authenticity and reliability of the data obtained from nanofriction and nanowear tests under a specific environment condition. The study result is not only helpful for enriching basic theory of natribology, but also for promoting the application of scanning probe technology.