The Centering And Leveling Adjustment And Control Technology For The Ultra-precision Rotary Workpiece

With the rapid development of national defense industry and manufacturing technology, the accuracy of surface topography measurement is more and more high. The surface topography measurement technology becomes the bottleneck of its development. It is inevitable that the rotary axis of the rotary table is greatly influenced by the precision measurement of large aperture optical rotary axis and the rotary axis. Study on rotary eccentric workpiece tilt adjustment control system will promote the further development of many disciplines, becomes a research hotspot in the field of precision engineering, it has important scientific significance and practical value.In order to realize the high precision adjustment and measurement of large aperture aspheric surface with large aperture and tilt, the paper combined with precision air floatation, centering and leveling adjustment table, high performance servo motor, photoelectric encoder, XYZ micro displacement driver, and circular grating. The system is based on the large scale and high precision of the air gas lubrication support technology. The rotary table is provided with three point support method, and the precision is provided by the piezoelectric ceramic micro displacement device. The centering and leveling adjustment is provided by auto measurement software design on the VC++ software, which is to achieve a large aperture aspheric surface shape measurement system of the automatic eccentric tilt adjustment. The main contents of this paper include:1. The overall design of the measurement and control system of the eccentric inclination. Based on the measurement principle of the aspheric surface, the paper introduces the basic principle of the rotary table of the three aspects, the hardware structure, the driving method, and the measurement method.2. Based on the mechanical mechanism of the four degree of freedom, the coupling relationship between the eccentric adjustment and the tilt adjustment is analyzed. According to the mathematical model of the eccentric adjustment and tilt adjustment, the automatic adjustment method is designed, and the realization process of the automatic eccentric tilt adjustment is described.3. On the basis of the simulation and software implementation of the measurement model and filtering method, the paper designs an auto measuring instrument based on VC++6.0 platform. It can realize the automatic adjustment of the non spherical surface of the workpiece contour measurement and automatic adjustment of heart.4. The experimental analysis of four degree of freedom automatic adjustment rotary table is carried out. The performance of the micro displacement driving unit is tested by the experimental tests of the micro displacement driving mechanism, the linearity and stability, the angle between the adjustment system and the measurement coordinate system is calibrated. The experimental test: centering adjustment operation will eventually converge to 0.5 μm, the leveling adjustment operation will eventually converge to 0.2 arcsec, and the adjustment time is 120 second.