Study Of Textured Zinc Oxide Film Serving As Front Contact Used In Amorphous Silicon Thin Film Solar Cells

Amorphous silicon thin film solar cells have a lot of excellent performance, such as a lower deposition temperature, lower cost and portability, and can also be used as a widespread power type solar cells. Low photoelectric conversion efficiency has been an obstacle to its development, so as to improve the conversion efficiency of amorphous silicon cells and textured zinc oxide film serving as front contact is introduced into the cell top.In this paper, researching on amorphous silicon solar cells from both experimental and theoretical: on one hand, the cell model is designed with zinc oxide electrode structure by Silvaco TCAD software. we also analyze the effect of device parameters on cell performance and optimize best performance of the solar cell parameters; On the other hand, zinc oxide films serving as front contact are prepared by magnetron sputtering technique. we also analyze the effect of growth parameters on optical and electrical properties of zinc oxide films. Through multiple sets of contrast experiment, high-quality zinc oxide front electrode films are prepared. Finally, in a day, further study of the effects of textured structure on the battery performance.The ZnO/p-a-Si/i-a-Si/n-a-Si/Al and p-a-Si/i-a-Si/n-a-Si/Al cells model are designed by Silvaco TCAD software. The best structural parameters of amorphous silicon solar cells : ZnO suede triangle vertex Angle is 10°、the ZnO thickness of 62.5nm、the ilayer thickness of 400nm、the p-layer thickness of 6nm、the n-layer thickness of 20nm、the doping concentration of 1019cm-3.Through simulation, we get the highest photoelectric conversion efficiency of amorphous silicon cells is 9.571%.Compared with no zinc oxide front electrode of the cell’s highest conversion efficiency of 8.412%, the efficiency increased by about 13.5%. In the case of fixed-height triangular suede, suede triangle vertex angle such that the battery will be reduced to increase the conversion efficiency. The higher the degree of suede, the better suede light trapping effect. Finally, calculate the energy generated by the battery during the day. Energy generated throughout the day to give 251.5J, improve the rate reached 19.6%. This suggests that the suede structure of nonnormal incidence light has better light effect.In the end, four groups of ZnO thin films were prepared by experiment. Using wet chemical corrosion way of preparing textured ZnO thin films were etched in three groups of samples, and then to four groups of sample performance were detected. Through the study of the sample transmittance, the total transmittance of the sample after etching is obviously increased, and the etching time is longer, the transmission rate is higher.