Design And Informationization Solution Of Ultrapure Water System

Immersion lithography is the key technology of the new generation of integrated circuit manufacturing, it improve the lithography resolution by filling Ultrapure water between the lens and silicon. The quality of ultrapure water greatly affects the quality of the lithography. The development of Pure Water System is an Important project in our country.This paper developed a set of water system, witch can purify the water used in the immersion lithography equipment. The system reduce the TOC, ion, dissolved oxygen in the water, remove particle pollutants, and provide the ultrapure water with relatively stable pressure to the next devices. In this paper, the content involves the preparation system process selection, process design, equipment selection, structure design, selection of control system, integration and test. In addition, this paper also designs a set of remote data manage system for the water system, witch greatly improved the ultrapure water system of data management capabilities. This paper is divided into four chapters:The first chapter systematically describe the requirement of immersion lithography for ultrapure water and the development of ultrapure water. At the same time points out the importance of developing ultrapure water information management system. Finally, this chapter puts forward the main research content.This chapter firstly introduces the ultrapure water system technology selection, selection of key components and process design, then introduces the system structure design, then analyzes the ultrapure water system control mode and make the technology selection. Finally, introduces the fabrication, installation and debugging process of ultrapure water system.The third chapter ultrapure water system for the development of information management system. This chapter from the data transmission, data storage, data analysis three aspects to introduce. First describes the transmission of data, and carries on the technology selection and scheme discussion, put forward the safeguard way, the format of the data and then introduces the choice of database of the data storage and database design, finally, the paper introduces the technology of data selection and page design.The fourth chapter summarizes this paper, and the future work of ultrapure water system is discussed.