Development Of Te₁₀-Te₀₁ Mode Converter

Microwave Electron Cyclotron Resonance?ECR?plasma coating technology is an important direction for the application of cryogenic plasma technology.Specific materials are deposited on the surface of the dielectric substrates to form a uniform thin film by the high-density,uniform plasmas excited by microwave.In this dissertation,the relationship between the distribution of plasma and the mode of microwave excitation field in the dissertation is analyzed to make the conclusion that TE₀₁ mode is the best excitation mode in circular waveguide.The design and manufacturing methods of microwave mode converter components shows that TE₀₁ mode can be excited in circular waveguide and TE₁₁main mode and other low modes can be inhibited by the converter.The design principles,simulation and optimization calculation,error analysis,manufacturing and testing of the converter components are showed in detail in this dissertation.Firstly,the design principles and structural of the converter was analyzed based on the coupled mode theory,and sidewall coupling mode is chosen as the coupling method of the converter.Secondly,the optimization and error analysis of the structure of the mode converter is simulated by HFSS software and a converter is designed with its conversion efficiency up to 99.92%.After a series of work including drawing,the optimization of manufacturing procedure,machining and testing,the reliability of the design of the microwave mode converter is proved by the analysis and testing results,and the optimal analyze and calculation are also carried out to discuss the method of improving the conversion efficiency of the microwave mode converter.