Study Of The Glass Degassing Based On The Glow Discharge Plasma Numerical Simulation

Vacuum glazing is used as the energy-saving building materials due to the advantages of heat preservation, heat and sound insulation, frost resistance and good wind load resistance strength. However, the gas adsorption and deflation of the glazing surface restricted its wide application. Traditional heating methods can't meet the requirements of degassing of large area glass. The plasma bombardment degassing method in a vacuum environment can produce clean glass surface with little gas, improving the quality and life expectancy of the vacuum glazing. Consequently, it has the good research and application prospect.Recently, plasma degassing investigation mainly focuses on the microelectronics and flat panel display industry. Its study in large area glass building materials is almost a blank. This paper designed a discharge structure of glass degassing equipment and established the mathematical and geometry model of the structure using COMSOL Multiphysics software. The shape, polarity and arrangement of the electrode were simulated based on a relatively simple discharge degassing structure. The effects of the plasma properties on the glass degassing were analyzed. The results showed that the ion current density was high and uniform when the electrode was negatively charged, the cross section of the electrode was circular, the electrode number was even, the plasma distribution was uniform, and the electron energy was high and vertically incide. And the under these conditions the glass degassing effect is better.The main parameters effecting the degassing including the distance between the electrode and glass H, the distance between the two electrodes L, the working electrode voltage U, and the vacuum chamber pressure P were selected to perform orthogonal experiment to optimize the degassing structure and parameters. The optimal parameter combination was obtained with H, L, U, and P of 0.1 m,0.15 m,-1200 V, and 2 Pa, respectively. These parameters have important guiding significance for vacuum degassing equipment and glass production line design.Based on the optimized results, further research of the effects of the other structure and parameters on the degassing effect was performed. The results exhibited that the degassing effect was better when the discharge electrodes were arranged in two rows than in one. Moreover, in the range of 0.15 m to 0.4 m, the distance between the electrode and the wall of the vacuum chamber is neglected.The results of degassing equipment structure design, parameter optimization and improvement of the existing equipment in this paper have practical guidance and reference value for the real work.