Preparation Of Graphene Electrode Materials Of Planar Micro-Supercapacitor

Planar micro-supercapacitor is a kind of new energy storage which has a tiny volume, fast charge-discharge speed, large cycle life and safe using condition. It is usually used for the energy supply of micro electronic devices. The performance of planar micro-supercapacitor mainly depends on the property of the electrode. Due to unique physical and chemical property, as a kind of new nanomaterial, graphene has become the most important electrode material of supercapacitor.Through analyzing the ion transportation mechanism of planar microsupercapacitor, the configurations of planar micro-supercapacitor with the gap width and finger width in small size are designed. The masks of planar micro-supercapacitor of series configuration and parallel configuration in different size are manufactured. The prepared graphene electrodes are dealed with through photoetching, magnetron sputtering, ultrasonic cleaning and plasma etching. After that, the surface of the graphene electrode is coated with gel electrolyte.In order to explore the effect of the pretreatment of Cu foil on the growth of graphene, The optical images of Cu foil before and after the pretreatment are analyzed. The rule of graphene growth on Cu foil is obtained with different growth time and concentration of carbon source under the low pressure by Raman Shift spector and AFM. The results show that graphene electrode is single-layer graphene under the condition of the growth time of 30 min, and the methane concentration of35sccm; when the methane concentration is higher than 35 sccm, graphene electrode shows multilayer trend; when the growth time reaches 60 min, the multilayer graphene is obtained which has good conductivity, but there are defects on the surface of the multilayer graphene. In conclusion, the best parameters of the graphene electrode are obtained with the condition of growth temperature of 1000?,the methane flow rate of 35 sccm, the hydrogen flow rate of 10 sccm and the growthtime of 60 min. The resulting graphene has a high tranmittance(92.7%-95.2%) and a good electrical conductivity(60.28-155.72?/sq).