Fabrication And Properties Of Carbon Nanotubes On Metal Substrates

High-density carbon nanotube(CNT) on conductive supports are envisaged as heat sinks in microelectronics. Such applications require the nanotubes to be grown vertically aligned,and in direct contact to conductive substrates.This is to provide an electrically conductive path through the nanotube support.Another requirement is to achieve a high area density of the tubes in order to obtain conductivity values comparable to metals.In this study, we prepared the uniform density, good surface morphology, the orientation of AlN is 110 by atomic layer deposition. Then, we deposition Fe particles and Ni particles on AlN film by magnetic filtration MEVVA ion deposition systems.Next, when the rate of acetylene is 120 sccm and hydrogen is 400 sccm, the CNTs arrays are best on metal supports by water-assisted chemical vapor deposition. On the growth stage of CNTs, Ni nanoparticles appear metallic, tip-growth mode for Ni catalyst with CNT diameters up to 20 nm. Fe nanoparticles are slightly oxidized,base-growth mode for Fe catalyst with CNT diameters up to 20 nm.It was confirmed that ACNTs showed excellent field-emission behavior. CNT array grown on cooper foil with Fe, emission started at anode voltage of about2.036V/ ? m and reached 10.012mA/cm2 at 3.478V/ ? m. CNT array grown on cooper foil with Ni, emission started at anode voltage of about 3.353V/ ? m and reached10.012mA/cm2 at 5.853V/ ? m. And it also confirmed that ACNTs showed excellent electrical properties as anode materials for lithium-ion battery. The first discharge capacity of ACNTs as high as 752.81mA/g with a good cycle performance.