Simulation And Design Purification Of Trichlorosilane Distillation System

TCS is widely used in the manufacture of polycrystalline silicon, monocrystalline silicon, chemical vapor deposition, gas and other electronic products, there is a high impurity content product, the larger the energy consumption problem in actual production.In this paper, in order to achieve trichlorosilane purity requirements, improve the efficiency of the purification process, on the basis of trichlorosilane purity requirements on reducing energy consumption, is divided into three steps.This article describes the nature of the catalytic mechanism of production and reflects the principles of trichlorosilane, describes the classification of filler nature and their respective applications. Hydrodynamic performance computing filler and mass transfer performance.In this paper, trichlorosilane distillation column equipment for the design and theoretical calculations and calculation software through aspen plus, of trichlorosilane distillation process computer simulation and optimization of distillation column operating flexibility make improvements to achieve improving the purity of trichlorosilane in industrial applications, reduce the energy consumption requirements.Data based on design requirements and simulation results on the size of the distillation column has been designed. And procedures for the various operating parameters were specified. In the design of the actual production results were verified to meet the original purity of trichlorosilane quality requirements.