Research Of Trichlorosilane Disproportionation Reaction Kinetics And Preparation Process Of Silane By Reactive Distillation

Owing to various factors such as economic development as well as increasing demand for energy and the combustion of fossil fuels,very high PM2.5 values have been reported in major cities in China;hence,it is imperative to search for alternative clean,renewable resources.As a clean,non-polluting,and inexhaustible source of energy,solar energy has become the primary choice,and polycrystalline silicon is the main material of solar cell.Silane is one of the main raw material of Preparation of polycrystalline silicon by silane method,silane also as electronic gas is commonly used in semiconductor microelectronics technology and silicon-containing coatings,the demand of silane is growing.Domestic polysilicon plant not has the ability to produce electronic grade polycrystalline silicon,electronic grade polycrystalline silicon product is limited by foreign country,which can't meet the required of rapid development of electronics industry and not conducive to the development of the electronics industry.The current production of polycrystalline silicon mainly use the improved Siemens method,improved Siemens method consume large energy and part of the key technology controlled by foreign country,led to polysilicon plant don't have the ability to produce electronic-grade and higher purity polycrystalline silicon.The production process of silane method is simple and low energy consumption,which can produce electronic grade polycrystalline silicon and meet the development needs of the rapid development electronics industry.Silane is the main raw material of silane method,how to prepare silane with low cost is a problem to solve.Aiming at the problem,studying the progress of trichlorosilane disproportionation reaction Preparation silane by reactive distillation,with the independently designed apparatus,silane was successfully prepared by reactive distillation.The main research work and results are as follows:?1?Hydrogenation of silicon tetrachloride to trichlorosilane was researched in this study.The influence of different reaction parameters such as temperature,pressure,space velocity,and the ratio of raw materials on the yield of trichlorosilane was investigated in detail.Moreover,the yield of trichlorosilane of approximately 19.81% was achieved at the reaction temperature of 1050 °C,pressure of 0.6MPa?absolute pressure?,velocity of 1000 h-1,and H₂ to SiCl₄ molar ratio of 4.?2?The kinetics of the disproportionation of trichlorosilane was studied.PA100 was selected as a good catalyst for the disproportionation of trichlorosilane,caused by its good catalytic activity and heat resistance.The effects of the reaction temperature,catalyst loading,and the particle size of the catalyst on the disproportionation of trichlorosilane were investigated.The kinetic model for the disproportionation of trichlorosilane was established for the calculation of the activation energy of the reaction and pre-exponential factor.?3?Disproportionation of dichlorosilane is researched,and reactive distillation with the disproportionation of dichlorosilane and trichlorosilane are also studied.The experimental apparatus was independently designed and used in the pilot experiment for the manufacture of silane via reactive distillation with the disproportionation of trichlorosilane.With the independently designed apparatus,silane was successfully prepared by reactive distillation.