Study On Process And Properties Of TiN Syntheiszed By Double Cathode Plasma Technique

Titanium alloy is very popular in the aerospace,watercraft and medicament fields.But it is also easy to be wear,easily oxidized,easy in reducing acid corrosion defects.Using appropriate advanced surface engineering method can effectively improve the properties of TC4,so the surface modification technology has become the most economical and flexible method to improve the friction and wear performance of titanium alloy.The preparation technology of hard coatings gradually becoming rich and mature through the efforts of the researchers.By depositing coating can improve the substrate's surface performance,ensure the size and shape at the same time.TiN coating they have been extensively use for machinery,aerospace,electronics,medical fields because of its high hardness,good wear resistance,biocompatibility,electrical conductivity.Therefore,much attention has been paid to using TiN coating modification.This article selects the double cathode sputtering deposition technology titanizing first,syntheticing TiN layer later.Using a SEM,TEM and XRD and other micro-analysis techniques to characterize the structure of the coating produced.The results showed that TiN coating surface smooth,the ingredients evenly without impurities.Corrosion behavior of nanocrystalline TiN films was determined by potentiodynamic polarization and electrochemical impedance spectroscopy in 3.5 wt% NaCl solution.The results show that the TiN coating significantly improves the corrosion resistance of titanium alloy matrix.Using nanoindentation tests and scratch tests to determine mechanical behavior of the coating,the results show that compared with the titanium alloy substrate,nanocrystalline TiN coating has high hardness and elastic modulus,good toughness.During wear test atroom-temperature and 500°C.The results indicate that the wear rate of TiN coating was lower.TiN coating has a good abrasion resistance.