| The photoelectric industry is developing toward flexible and lightweight devices,and its requirements on the performance and process of transparent conductive films are also more demanding.At present,the most widely used transparent conductive film is ITO film.But indium metals are scarce and expensive,and the mechanical brittleness of ITO transparent conductive film causes its bending to be invalid,ITO has great limitations in the application of flexible films.Compared with ITO,graphene shows its advantages in light transmission,stability and bending resistance.In view of this,our research used graphene as interlayer of two layer ITO on the regulation of photoelectric properties and mechanical properties of transparent conductive thin film,and develop ITO/graphene(1-5)/ITO films.In this research,graphene was used as the interlayer preparation scheme for the upper and lower two layers of ITO to regulate and control the photoelectric and mechanical properties of transparent conductive films,then developed ITO/graphene/ITO thin film.At first we optimized the vacuum degree of single layer ITO coating process to prepare single layer ITO film with good photoelectric properties and thinner thickness.Secondly,we optimized the transfer process based on the graphene prepared by CVD method,then investigated the properties and morphology evolution of graphene(1-5).Finally,we combined the optimized ITO with laminated graphene to develop ITO/graphene/ITO thin film,then carried out a series of fine characterizations of its properties and morphology evolution.Under low vacuum background,ITO films prepared by magnetron sputtering would have serious shadowing effect.With the increase of the thickness,the shadow effect was increased.The conductivity of the smaller film could be better than the larger thickness.With the increase of vacuum background,the thickness of ITO film increaseed gradually;the Sheet resistance decreaseed nonlinearly;carrier mobility had little change,and its conductivity depends mainly on carrier concentration;the transmittance decreased first and then increased.The increase of background vacuum would weaken the shadowing effect on the surface of the films,enhanced the migration ability of the ITO atoms,and changed the morphology of the films from loose tissues to dense and fine tissues.ITO thin film had the best optical and electrical properties when it was sputtering in the highest background vacuum(3.8×10-4 Pa).With the increase of layers of laminated graphene,defects were increasing during the transfer process,and the disorder of graphene increased and the crystallinity decreases;the sheet resistance of ITO/G and ITO/G/ITO thin film decreases gradually;transmittance decreased gradually.The transmittance of laminated graphene decreased with wavelength to a certain extent.When the layers of laminated graphene was two,sheet resistance of ITO/G/ITO was 106.3?/sq,the transmittance is 72%,which was its optimum photoelectric performance. |
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