The Research Of VO₂ Films Prepared Bymagnetron Sputtering And Optical Properties Modification

Energy used in buildings, for heating, cooling and lighting, accounted for roughly 30% of China's and 40% of the EU's total energy consumption. These heating and cooling costs are directly influenced by architectural design. Increasingly, governments are regulating the energy efficiency of new or refurbished buildings, and one of the main features that can impact total building efficiency is glazing. The desirable qualities in a smart window coating are: appropriate switching temperature(Tc), a large decrease in transmission on heating above Tc, a large increase in reflectivity on heating above Tc, together with a high visible transmittance avoiding extra energy consumed on indoor lighting. In this article, we use the DC magnetron sputtering and RF magnetron sputtering to prepare avanadium oxide thin,W doped films and VO2- low-e composite films. The first step is preparing the vanadium oxide thin film with low thickness.due to the low film thickness and high porosity,the fils hav high transmission and excellent crystallinity characteristics.However,the low thickness VO2 films have higher ultraviolet radiation and infrared radiation.So we use Low-e films to reduce the emissivity of the films. In this paper, XRD, SEM, and transmittance testing are used to characterizing the crystallization and solar adjustment ability. At last, we get these conclusions.1. For low thickness films, controlling the annealing process parameters has a critical impact on the overall performance of the films.Through optimizing the process parameters, the film with higher than 60 % in the visible region and while having 44% change at the transmittance of 2000 nm between high difference phases is successfully prepared.The thickness of the film is about 12 nm and the phase transition aroud 52 ?.2. By the introduction of W,the phase transition temperature can be lowerd efficiently.The transition of 0.5% W doped film is lowerd to 44 ?.3. In the other hand, low thickness films have higher ultraviolet radiation and infrared radiation rate.To solve the problem,we design the composite structure of VO2/low-e glass.Then we design three different ways to the best way to preparing the high performance composite films,The three different structure are Low-e glass/VO2/substrate,VO2/Low-E glass/substrate and VO2/Low-E glass.Through the testing the last way is the best way to prepare the composite films.