Study On The Property And Mechanism Sensitive To Hydrogen Of Tungsten Oxide Films Doped Catalyst

Tungsten oxide film material is a important functional material. It is studied and applied extensively because of its electrochromic property, gasochromic property, photochromic property, electrochemistry, etc. Especially gasochromic property is applied to gas sensors extensively. Because of it is not sensitive to hydrogen at normal temperature, so tungsten oxide with doped catalyst to improving its hydrogen response was adopted. The tungsten oxide films with Pt and PdCl2 catalyst were prepared with sol-gel and DC reactive magnetron sputtering methods. Simultaneously the optical property and surface structure of the catalyst films was studied.Firstly, the mechanism of hydrogen response and developmental actuality were summarized in brief. Secondly, preparative methods and main materials, instrumentation, technological process were introduced in detail. Thirdly, all the films in various condition were tested and compared each. At last, the importance factors which affect the properties of the films were analyzed particularly.The tungsten oxide films with catalyst by two methods were characterized by X- diffractometer, tunnel scan-atomic force microscope, FT-IR, double-beam UV-VIS-NIR spectrophotometer and speediness volt-ampere cycle meter. As results of x-diffractometer, Pt/WO3 sputtered film samples are crystal when annealed at 400℃with distinct diffractive acuti-apices. Reversely, Pt sputtered tungsten oxide sol-gel films and tungsten oxide sol-gel films with PdCl2 catalyst are amorphous when annealed at 400℃without distinct diffractive acuti-apices. When annealed at 460℃the films are crystal with bigger FWHM and diffractive acuti-apices. The temperature from amorphous to crystal of tungsten oxide sol-gel films with catalyst is increased and the reason is in studying.As results of tunnel scan-AFM, both Pt sputtered tungsten oxide films and Pt sputtered tungsten oxide sol-gel films there is distinct and out-of-order parallel line structure on the surface of amorphous. Molecules of the sample tend to tetrahedron and the former has more planarer structure. Atoms of the film by DC reactive magnetron with Pt sputtered tend to plane ordinal structure. Molecules of the the film by sol-gel with Pt sputtered tend to be surface center structure as WO6.As results of FT-IR, the characteristic oscillation of the tungsten oxide sol-gel film with PdCl2 catalyst is more distinct with the higher temperature at the wave band...