Research On Preparations And Properties Of The VO₂ Thin Films Based On Intelligent Window

In the past thirty years, the global energy shortage has become more and more obvious, and has become the focus of research in the key areas of energy conservation. Put on a layer of special film on the windows of buildings, if it can according to the indoor temperature to the infrared light out of the window into the reflex control, in order to achieve the purpose of indoor temperature control, so such windows that for smart windows. Smart windows in the building can effectively reduce building energy consumption.1. In this paper, the characteristics of the two vanadium oxide is described in detail, and also analyzed the current domestic and foreign research status of two vanadium oxide, which leads to the research purpose and research direction of this paper. In addition, this paper also introduces some common methods for the preparation of two vanadium oxide thin films, and the recent research results of these methods are also investigated.2. This paper focuses on the preparation technology of VO₂ thin films based on DC magnetron sputtering method. The effects of process parameter on the properties of the films were studied in detail, such as the sputtering DC power, the ratio of oxygen to argon in the sputtering process and the sputtering pressure. Through many experiments and summarize the results as following: the DC power of 200 W, sputtering time of 30 min, oxygen argon ratio of 0.04, sputtering pressure of 2.00 Pa, after that, annealing in hydrogen in an environment of 500 oC with 2 hours. In this way, the phase transformation characteristics of this VO₂ thin film will be better.3. Tungsten Doped VO₂ thin films have been prepared by double target magnetron sputtering in this paper. The experiment with different parameters of the target power, the influence parameters on the properties of the films is researched. Through many experiments and summarize the results as following: the vanadium target power of 200 W, sputtering long for 30 min, oxygen argon ratio of 0.04, argon pressure under the conditions of 2.00 Pa and tungsten target power of 10 W when prepare the tungsten doped VO₂ thin films which perform most suitable for smart window film, as the phase transition temperature can be reduced to 35°C.