Research On The Accuracy Of Characterization Of Diamond Tools Shaped By Focused Ion Beam

The development of ultra-precision manufacturing field has a large demand for diamond tools.Thus,how to prepare high-precision diamond tools and achieve quality evaluation of cutting tools play an important role in the development of ultra-precision machining technology.Aiming to the diamond tool's fabrication and application,the paper analyzed the interaction mechanism of ion beam with sample,the evaluation of cutting tools and the deflection in the cutting process.Firstly,in order to have a better guide for actual machining,the paper did a basic analysis on the mechanism of focused ion beam(FIB)which is widely used in nanofabrication field.Base on Monte Carlo program,the paper simulated and analyzed the law of ion into typical substrate such as carbon and silicon.Besides,the paper studied the influence of energy,angle and some other parameters on some relevant parameters,such as range,energy damage and lateral straggle.In addition,the paper designed image enhancement algorithm and sub-pixel edge location algorithm,and then set up a detection system which is used to measure the parameters of diamond tools based on image processing.It shows that the straight edge diamond tools based on FIB has a good shape accuracy.For example,the arithmetic average deviation is 8.9 nm,waviness is 10 nm.By analyzing,the image processing method to evaluate the diamond tool's accuracy is feasible.Based on the high-resolution characterization of scanning electron microscopy,the paper achieved to detect the change of cutting force.The method obtained the position of cutting tools based on dimension calibration and tracking,then we can get deflection curve from the position of tools.The system achieved the detection of different types of diamond tools and the deflection change in the entire cutting process after Image acquisition and video acquisition.And it promoted basic research and development of diamond tools machining effectively.