Fabrication Of Nanocrystalline Diamond Micro Cutters Based On Focused Ion Beam

As an important part of ultra-precision machining technology,ultra-precision cutting plays an indispensable role in all fields of national defense,production and science.Similarly,as the main part of ultra-precision machining,the position of cutting tools is becoming more and more important.The quality of cutting tools directly affects the final result of machining.Super hard nano-twinned materials(ntD)by virtue of its excellent mechanical properties and physical properties,has become an important choice for cutting tool material preparation process.In this paper,nano-twinned material is taken as the research object,and the feasibility of manufacturing micro cutting tools with focused ion beam(FIB)technology is discussed,aiming at machining cutting tools with excellent cutting performance.Firstly,we discusses the basic theory of ion beam bombardment of solid materials.Then,we detailed analyze the interaction between the ion beam and the surface of the material.We analyzed the mechanism of the removal of the processed materials and the various particles produced..We analyze the range and energy loss of ions in solid materials and the "channeling effect" produced by ion beam processing and its influencing factors.Based on the SRIM simulation software,we regard the actual processing parameters of FIB equipment in the optional voltage as reference,and we analyze the influence of ion beam incident voltage produced by different machining process.Considering the actual back angle,we change the incident angle of the ion,then analyzes its influence on the process of producing.A selection of ion incidence voltage and incidence angle for FIB milling of nano-twinned materials is preliminarily selected.We use different processing parameters(ion acceleration voltage,incident angle,ion beam dwell time,beam overlap ratio)to mill the same groove on the surface of material which is polished firstly.The micro-structures were detected by the scanning electron microscope(SEM)and atomic force microscope(AFM),and the surface roughness of the bottom of the rectangular groove was detected by using the scanning electron microscope(AFM).The same size rectangular grooves were processed by steam assisted milling,and the effect on the micro-structure of FIB was analyzed.By comparing the experimental results with the SRIM simulation results,the machining parameters of the best FIBmilling nano-twinned material were determined.The defects in the process are analyzed,such as the formation of the side wall and the groove structure,then some solutions are given.For the processing of cutting tool with sharp edge,first of all,the processing order of each surface should be determined.Finally,a reasonable processing scheme of nano-twinned materials micro-cutting tool is presented.We use the focused ion beam machining technology to produce nano-twinned micro-cutting tools with sharp edges.Then the blunt circle radius of the blade is detected by atomic force microscope,and the micro cutting tool with the radius of the blunt circle less than 50 nm is obtained,which is in line with the basic requirements of the micro tool.