| Due to the machine parts and cutting tools wear which causes the national enormous economic losses and at the same time the industry has came up with more needs for wear resistance films,it is significant to develop the better performance protective films.It also has been demonstrated that machine with wear resistance deposited by surface technology can improve the life time efficiently.Therefore,the CrAlN films and CrN/CrAlN multi-films were deposited on304 stainless steel by direct reactive magnetron sputtering and then the annealing treatment was carried out on CrN/CrAlN multi-films.The effects of nitrogen flow on the properties of CrAlN films were comprehensively studied under laboratory conditions.Further more,based on the above investigation,the CrN/CrAlN multi-films were also deposited on 304 stain steel by direct reactive magnetron sputtering.Then the annealing treatment was performed in vacuum for 60 min under different temperature.The effects of modulation and annealing temperature on the microstructure and tribological properties were been system investigated.The main conclusion as follow:1.The microhardness of CrAlN films increase with the increase of nitrogen flow and then decrease for further increase the nitrogen flow.Contrary to the friction coefficient and wear rate,they decrease with the increase of nitrogen flow and then increase for further increase the nitrogen flow.The main phases of films were CrAlN and Cr2 N phases.When the nitrogen flow is 20 sccm,the CrAlN films presented the maximum microhardness and minimum friction coefficient which exhibited best wear resistance.2.The main phases of CrN/CrAlN multi-films deposited by direct current reactive magnetron sputtering were CrAlN and Cr2 N and CrAlN phase present(200)preferred orientation and Cr2 N phase present(111)preferred orientation.The surface roughness increase with the increase of modulation period and then decrease for further increase the modulation period to 543 nm.However,the microhardness decrease all the time with the increase of modulation period.The wear test showed that friction coefficient,wear rate exhibited similar tendency with surface roughness.When the modulation period was 102 nm,the films exhibited maximum microhardness and minimum wear rate with the value of 0.31×10-14m3/N·m-1.The CrN/CrAlN multi-films exhibited better wear resistance than CrAlN films although the microhardness of films were relative lower than CrAlN films.3.Annealing treatment has a great influence on the performance of the film.The results showed that the surface roughness of films increase with the increase of annealing temperature,when the temperature was 800?,the surface roughness reached maximum value.However,the microhardness of films exhibited the tendency of decrease with the increase of annealing temperature.Furthermore,the annealing treatment has a great influence on the phases.Compared to the CrN/CrAlN multi-films without annealing treatment,the intensity of Cr2 N in(111)plane decrease and the intensity of CrAlN in(200)plane increase.What is more,XRD results showed the CrN/CrAlN multi-films exhibited Cr2 N phase and peaks of Al2O3 and Cr2O3 when annealing temperature was 600? and for further increase the annealing temperature to 700?,the films presented Cr2 N phase of(300)plane.The wear tests showed that the friction coefficient of films increase with the increase of annealing temperature.However,the wear rate presented the tendency of increase with the increase of annealing temperature and then decrease further increase the annealing temperature to 800?.Therefore,the films exhibited the minimum wear rate when the temperature was 400? and maximum wear rate when the temperature was 700?.In a word,compared to the CrN/CrAlN multi-films without annealing treatment,the annealing treatment can improve the wear performance efficiently when the annealing temperature were 400?,500?,800? which demonstrated that the annealing treatment can improve the performance of films. |
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