Nano Manipulator Driving Device Control Method Research And Experimental Design

Nanotechnology is being concerned by more and more technical staff and agencies , has attracted more and more attention and developed rapidly.Nano technology is the basis for the operation of nanotechnology, now with molecules, atoms and processing of nanoscale materials, nano technique has been very hot. Nano operating system is a system operated by the actuator end for operating nanoscale objects, and can be applied in different fields such as medicine, biology, electrical engineering. Nano operation system based on SEM with real-time imaging, sample without affecting basal, multi robot coordination, large operating space, higher degrees of freedom and flexibility, complex three-dimensional operation, the utility model can be carried out,etc. have great potential in medical, biology, nano materials,and environmental aspects. This paper is a part of the nano operation system based on SEM,aiming at the field of nano operation in SEM. The main contents of the study are:In the first chapter, the background of nano technology, nano operating system, nano technology, nano operation system, nano operation control technology research status, and the source of the topic and its significance are explained.In the second chapter, the introduction, the integration of the SEM (scanning electron microscope) and the nano manipulator is presented. The structure and working principle of SEM are analyzed, and the structure and composition of the nano manipulator are analyzed.The principle analysis of the stick slip driving principle of the piezoelectric actuator is given,and the design of the stick slip driving circuit is introduced.In the third chapter, the model of piezoelectric actuator is analyzed, and the relationship between input voltage and output displacement is obtained by analyzing and combining the electrical and mechanical dynamic model. Then the digital PID is necessary to explain, for this chapter to the model control and the fourth chapter based on the digital PID improvement algorithm to do the bedding. Finally, the transfer function of the model is obtained by using PID control in MATLAB, and the PID parameters are determined after the experiment and the results are analyzed.In the fourth chapter, first of all, BP (back propagation) neural network were necessary analysis, understanding of the BP neural network structure and BP algorithm are derived and related to the variables and functions, BP neural network learning step, BP neural network to achieve the process needs to consider some of the problems. Then given the training method of BP neural network PID control algorithm, the control model, function signal and calculating method, the error signal system based on BP neural network. Then use the S function as well as the Simulink module intuitive comparison of the two control algorithms in the same input signal output, and finally to the comparison of the two. Finally, the further improvement direction of the improved algorithm is given, and a new approach to the improvement of the algorithm is proposed.In the fifth chapter, the installation of the operating system and the steps of the test are described, and the operation strategy of the nanowire is analyzed and how to pick up and place the nanowires using EBID. The operation method of automatic measurement of nano wire resistance, pressure resistance, and four probes are given, and the related MEMS(microelectromechanical systems), Schottky barrier and image processing to do the necessary instructions.