The Magnetron Sputtering Technology Research Of Depositing Al-Mn Coating On NdFeB Magnet

NdFeB magnetic materials are widely used in the new energy automotive manufacturing,wind power generation,new motor and other high-tech industries.While,he magnet corrosion resistant performance is poor.Doing anti-corrosion treatment for The magnet is the key factor to Improve the magnet use value.after Comprehensive comparison of various kinds of anti-corrosion measures In this paper,the preparation of Al Mn alloy thin films on the surface of NdFeB magnets by magnetron sputtering in PVD was studied,which also has important guiding significance for practical industrialization.Magnetron sputteringcoating process parameters have an important impact on the corrosion resistance of film,The impact on the corrosion resistance of film by coating process parameters was studied by design orthogonal test for Ar pressure,target substrate distance,negative bias voltage,target current and so on.so adjust the parameters of the coating process could improve the corrosion resistance of the film.The corrosion mechanism and properties of Al-Mn alloy films prepared by splicing target were studied.Different Mn content of Al-Mn alloy films was prepared.by Replace Al-Mn alloy Target of different manganese content.the surface morphology and composition of films being analyzed by SEM,EDS and XRD.The Mn content of target on composition,surface morphology and phase structure of the films was studied.corrosion resistance of Al-Mn alloy film of different Mn content was analyzed by Electrochemical workstation.The influence of structure to corrosion resistance of film was studied.The mechanics properties of the film was studied by hardness tester and multifunction surface performance tester;The Properties of Al-Mn alloy films prepared by melting target were studied and analyzed.By comparing the properties of the films prepared by splicing target and Smelting target,the performance of the films prepared by smelting target was better..In summary,preparation of amorphous Al-Mn alloy film in NdFeB magnet surface by magnetron sputtering showed its excellent corrosion resistance,which is a kind of promising magnet protection technology.