Resarch On Microstructure,Mechanical And Tribological Properties Of TiCN And TiVN Films

A series of TiCN composite films with different C content and a series of TiVN composite films with different V content were deposited on Si(100)and 304 stainless steel by JGP450 multi-target magnetron sputtering technique.The chemical components,microstructure,microhardness,adhesion,friction and wear properties these films were investigated by scanning electron microscope(SEM)with energy disperse spectroscopy(EDS),X-ray diffraction(XRD),nano-indentation,ball-on-disc tribo-meter and 3D profilometer.The results are as follows:The research of TiCN composite films indicated that,TiCN composite films with different C content were face-centered cubic structure,the preferred orientation was(111)crystal face,with the increase of C content,(111)diffraction peaks gradually shift to smaller angle,and constantly broadening and weakening.The existence of C atoms in TiCN composite films: some C atoms occupy the position of N atoms in the TiN lattice to form substitutional solid solution,and some C atoms exist in the form of amorphous lubricating phase.With the increase of C content,the hardness of TiCN composite films increased first and then decreased.When the content of C was 19.10 at.%,the hardness reached the maximum value,32 GPa.The results of friction and wear tests at room temperature show that: with the increase of C content,the average friction coefficient of TiCN composite films decreased gradually,the addition of C could effectively improve the tribological properties of Ti CN composite films at room temperature,and the higher with C content,more excellent the friction performance was.In addition,the wear rate of TiCN composite films first decreased and then increased at room temperature.When the content of C was 19.10 at.%,the wear rate reached the minimum,3.76×10-8 mm2N-1.The results of friction and wear tests at high temperature show that: with the increase of temperature,the friction coefficient and wear rate of TiCN composite films were increased.The results show that the addition of C can not effectively improve the friction and wear properties of TiCN composite films at high temperature.The research of TiVN composite films indicated that,TiVN composite films with different V content were face-centered cubic structure,when the content of V was 9.48 at.%,VN(111)diffraction peak appeared,TiVN composite film was TiVN and VN dual phase structure,the preferred orientation was TiN(111)crystal face,and with the increase of V content,TiN(111)diffraction peak gradually shifts to larger angle.The grain size of TiVN composite films decreased first and then increased with the increase of V content.When the V content is lower than 9.48 at.%,V atoms occupy the position of Ti atoms in the Ti N lattice to form substitutional solid solution(Ti,V)N;when the solid solubility of V atoms in the films reaches saturation,the excess V atoms combine with N atoms exist in the form of VN.The hardness and the elastic modulus of Ti VN composite films first increased and then decreased with the increase of V content.When the content of V was 4.53 at.%,the hardness reached the maximum value,23 GPa.At the same time,the elastic modulus reached the maximum value of 281 GPa.The results of friction and wear tests at room temperature show that: the average friction coefficient of Ti VN composite films increased slightly and then decreased gradually with the increase of V content,and gradually stabilized around 0.66.In addition,the wear rate of TiVN composite films first decreased and then increased.When the content of V was 4.53 at.%,the wear rate reached the minimum,6.88×10-8 mm2N-1.The results of friction and wear tests at high temperature show that: when temperature is below 300?,the average friction coefficient of TiVN composite films increased gradually with the increase of temperature;when temperature is higher than 300?,the average friction coefficient of TiVN composite films decreased gradually,because TiVN composite films formed V2O5 with low shear modulus and self-lubrication to act as solid lubricant,and at 700?,the average friction coefficient reaches the minimum,0.44.In addition,the wear rate of TiVN composite films increased gradually with the increase of temperature.