Research On Rotary Ultrasonic Vibration Assisted Grinding For Low-expansion Glass

With the rapid development of science and technology,people's demands for optical components are increasing.Low-expansion glass,which is known for its ultra-low coefficient of thermal expansion and good optical properties,has been widely used in construction,chemical industry,aerospace technology,medical facilities,electronics industry,weapon equipment and other important areas of manufacturing.However,common grinding on low-expansion glass-one hard and brittle material-has a low processing efficiency,and thus,is not suitable for large-scale production of high-quality optical components.Rotary ultrasonic vibration assisted grinding is a new processing method with high quality and high efficiency.This method not only avoids size restrictions of work-piece in general ultrasonic vibration assisted grinding,but also improves the overall stiffness of the system.In this paper,two kinds of low-expansion glass(Zerodur and ULE)with rotary ultrasonic vibration assisted grinding have been analyzed.To begin with,the precision dressing process of the resin-based diamond grinding wheel was studied.By the comparison between common dressing and ultrasonic dressing,characteristics of the ultrasonic dressing were revealed,and one suitable dressing parameter was concluded to realize precision machining on low-expansion glass.Then,by indentation tests and scratch tests,properties of two types of low-expansion glass under dynamic load and static load were revealed.The removal characteristics of materials under single abrasive grain were concluded and the processing performance of the material under rotary ultrasonic vibration assisted grinding was estimated.Finally,results of grinding experiments for two types of low-expansion glass were analyzed by orthogonal experiment and neural network respectively.The advantages and disadvantages of the two experimental methods were compared,and the grinding parameters were optimized.Rotary ultrasonic assisted grinding on low-expansion glass with high precision and high efficiency was achieved in the end.