Research On The Control Of Accuracy In Micro Electrochemical Milling

With the development of micro fabrication technology,micro parts and components products in various fields of social applications more widely.As a kind of advanced manufacturing technology,fine electrolytic processing technology has the advantages of good surface quality,no residual stress,no loss of tool electrode,etc.,and has unique advantages and promising application in the field of miniature parts manufacturing.Micro cavity and micro groove(penetrating or not penetrating)structure in the aerospace,precision instr?ments,medical equipment and other fields have a wide range of applications.The machining accuracy and surface quality of micro cavities and micro grooves have an important effect on the performance of micro parts.In the process of fine electrolytic milling,the machining accuracy of micro cavities and micro grooves is often difficult to guarantee due to the presence of spurious corrosion.In this paper,based on the laboratory of micro-electrolytic processing equipment and control procedures,from the pulse power,electrolyte and process design,etc.,to study how to improve the micro-cavity and micro-groove size accuracy and shape accuracy.Micro cavity is a micro component commonly used in the microstructure,machining gap is a very critical factor in micro electrochemical machining.In this paper,we study the influence of processing parameters(pulse parameters,electrolyte type)on the machining gap,surface quality and material removal rate of the cavity.In this paper,four experiments were designed and 12 microcapsules were processed.With the increase of the pulse parameters,the processing gap of the micro-electrolysis process is increased,the removal rate of the material is improved and the acidic electrolyte is better than the neutral electrolyte to meet the requirements of the micro-electrolysis process.As well as the choice of electrolyte type has important guiding significance.Through the front of the processing parameters of the bedding,this paper focuses on finding the best micro-electrolytic milling slot machining accuracy of the experimental parameters.In this paper,five experiments were designed.The effects of pulse amplitude,pulse frequency,pulse width,layer thickness and electrolyte concentration on micro grooves machining precision were studied.Three micro grooves were processed for each processing parameter.In this paper,a set of optimal machining parameters is selected by analyzing the experimental data,and twelve micro grooves are processed under the optimal processing parameters.The error of the micro grooves width and depth are effectively controlled within 3?m,the angle of the micro groove side can be controlled between 90 ° ~ 96 °,the bottom radius of the micro grooves can be controlled within 17?m,the bottom roughness(Ra)of the micro grooves is between 30 nm and 90 nm.