Research On Process Of The Consolidated Abrasive Ultrasonic Lapping Based On Equivalent Impedance

Sapphire has been widely used in the field of optical communications,microelectronics and military because of the characters of high temperature resistance,good transmission of light and good chemical stability,ect.However,sapphire belongs to typical difficult machining materials,which is one kind material cannot achieve precision machining through traditional processing.Because of its unique processing technology,Ultrasonic lapping become a kind of important method of precise and ultraprecise machining.A series of process technology researches on fixed abrasive ultrasonic lapping based on equivalent impedance are carried out to solve the processing technical problems.The concrete research contents are as follows:1.Ultrasonic lapping vibration system with fixed abrasive is developed.Mainly tasks are focused on the design,simulation and produce of piezoelectric ceramic transducer and amplitude transformer,and the performance tests about resonance frequency and amplitude are conducted.As the results show that the resonance frequency of ultrasonic lapping vibration system is complied with the design requirements,and the amplitude meet to the requirements of the sapphire lapping process.2.Consolidated abrasive ultrasonic lapping pad is developed.A series of ultrasonic lapping pads with many different sizes and thicknesses are designed.These pads are made by epoxy resin as matrix,diamond as abrasive which mixed in certain proportion.The tests about influence of lapping pad thickness on vibration performance is conducted,and the results show that resonance frequency and the equivalent impedance are under control when the maximum thickness of lapping pad is 4 mm.3.The ultrasonic lapping system platform is built and experiments are conducted.The programming and debug works of ultrasonic lapping control system are completed.X,Y,Z three-axis real-time control of ultrasonic lapping device is visually realized.We design a single factor experiment to research on the influence of ultrasonic lapping parameters,abrasive particle size and trajectory on the material removal rate and surface quality of sapphire,the test results show that ultrasonic lapping with fixed abrasives based on equivalent impedance can obtain a good surface quality.