Preparation And Device Research Of New Type Two-dimensional Carbide Materials

Since 2004,the discovery of graphene has aroused great concern for two-dimensional materials,which be a step forward in the development of nanomaterials.Similar two-dimensional materials with a band gap have been focused,such as Mo2S,W₂S,Mo₂Se,etc[1,2].Transition metal carbides of Mo₂C are a new class of materials that are both ceramic and metallic.On the one hand,they have high hardness,high melting point,high stability and good corrosion resistance at high temperatures,good thermal shock resistance to low chemical resistance and so on.On the other hand,they show excellent catalytic activity and better sub-metal conductivity,comparable to precious metals and to often used in many reactions.Thus,growth of large-scale high-quality transition metal two-dimensional materials for further studying its performance is necessary to exploxe two-dimensional material application.In this paper,a large amount of ultra-thin monocrystalline Mo₂C was prepared by CVD method.The Cu/Mo double-lamination substrate was used to introduce methane,and hydrogen and CH₄ gases as the reaction source.The two-dimensional Mo₂C materials were grown on Cu/Mo substrate,and the effect of praparing the large area high quality single crystal Mo₂C include the gas flow rate,growth temperature,growth time.And then the prepared Mo₂C was characterized by optical microscopy,XRD,Raman,XPS,SEM and TEM in detail.The two-dimensional Mo₂C prepared by CVD was of high quality and few defects.The samples were characterized by X-ray photoelectron spectroscopy and optimized under different conditions to optimize the optimal conditions for growth.Finally,the transfer method of the single film and performance were investigated systemically.Firstly,Mo₂C was separated from the substrate coated with PMMA as the protective layer before copper was removed from the ammonium persulfate solution.And then,Mo₂C is transferred onto the doped Si with a thickness of 300 nm SiO₂ layer,the field effect structure device was prepared by micro-nano processing.Through the testing of the semiconductor tester 4200,results show that Mo₂C shows excellent conductivity and conductive capacity adjustable performance.