| Traditional strain dynamometers can no longer meet the increasing demand for machining accuracy in machining.At the same time,the development of thin film technology has provided the conditions for the preparation of micro sensors.Therefore,thin film sensors have become the object of competing research in various fields.The study of the thin film sensor for measuring cutting force has important significance for improving the precision and efficiency of the cutting process and effectively monitoring the machining process.In this paper,the principles of force measurement,tool system design,finite element analysis and thin film sensor preparation are mainly studied.The principle of force measurement of sensor is expounded,and the sensor unit is designed and studied from component,material selection to resistance gate structure.The advantages and disadvantages of two kinds of resistive gate structure are compared,and the influence of transverse effect on resistance value of resistance grid is analyzed.Based on the method of improving the output characteristics of the thin film microsensor and coordinating the tool strength and rigidity,the cutting force measuring tool system of several embedded thin film microsensors was studied.A tool structure which is connected by a screw with a tool and a measuring force sensor is designed.The profile of the section shape of the cutter bar is established,and the function relation of the shape of the section and the output characteristic is deduced.Several turning tool structures have been designed to improve sensitivity while achieving two-way force and three direction force measurement respectively.ABAQUS finite element software was used to analyze the stress of several tool structures and verify the reliability and superiority of the structure.The stress change of the tool structure is analyzed when the thickness of the elastic thin slice is reduced from large tosmall,and the influence of the thickness of the elastic structure on the output characteristics of the sensor is obtained.The test scheme of surface response method was designed,and the factors affecting the film sputtering rate were studied.The technological parameters of Ni80Cr20 thin film were discussed.Minitab analysis software was used to do regression fitting of test data,and the surface and graph were analyzed and compared,and the best parameter range of each factor was obtained. |
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