| In the advanced manufacture industry,micro-/nano-manufacturing capacity is the core competitiveness for the many competitors in the market,is the core driving force of the development of optoelectronics,biology,medicine,new energy,new materials,precision instruments,and is the ultimate way to solve the manufacturing problem of the core component in the manufacturing industry.Femtosecond laser micro-/nano-fabrication is one of the most promising manufacturing methods in micro-/nano-fabrication.However,as the manufacturing are gradually characterized by functional and personalizing,in order to fabricate precise instruments,high energy physics core experiment parts,hard brittle material,transparent material,it is increasing hard to meet the demand of functional,decorative bending surface structure manufacturing,thus bringing the complex process,high energy consumption,low productivity of processing problems.It is of urgent need to develop a direct,effective,fast technology for curved surface structures,especially in micro-/nano-machining.Femtosecond laser micro-/nano-processing,with the unique properties of ultra-fast duration,super-high peak power,high resolution,has the advantages of material processing adaptability,cold working and little recasting effect.But limited to the technologies of machining points,lines and planes,capacity of bending structure processing is low.With the continuous development of space optical shaping technology in the field of non-diffraction optics,a special beam that can be bent in free space propagation received immediate attention from the world-wide scholars since it was first realized in the laboratory.The related research topics started from the principle,characteristics of propagation,and gradually expanded to the field of application-oriented researches.This research will try to combine the advantages of femtosecond laser processing and space optical beam shaping technology to develop the femtosecond laser bending process technology thus expanding the ability of femtosecond laser processing.The main researchesare as follow:1.The characteristics and advantages of femtosecond laser processing were verified.We started from femtosecond laser micro processing with Gaussian beam by tapping processing method,characterized by multi direction imaging,analyzed the influence of the key technology indicators,such as pore diameter and depth to diameter,systematized the micro processing technology methods,summarized the microhole processing rules.2.The Airy beam is realized.In theory,we realized Airy optical field theory description and the parameterization control of Airy beams using simulation technology with MATLAB software,researched the influence of key parameters to Airy optical field properties,summarized the rules of Airy optical beam changing with the variation of the parameters.Combined with femtosecond laser and spatial lightmodulator,using Fourier lens generation method,we realized Airy optic field which derived from Gaussian optical field and verified the numerical simulation results,summarized the effects rules of the Airy beam properties,such as diffraction free and self-acceleration influenced by the experimental parameters.3.Combining the advantages of femtosecond laser processing and the self-accelerating curved property of Airy beam,the bending structure was realized.We built the femtosecond laser Airy beam machining system,successfully fabricatedthe curved groove structure,verifiedthe method of the femtosecond laser combined with Airy beam can really realize to machine the curved structure,and summarized the processing technology and the law of parameters.4.We explored a new method for the generation of self-accelerating curved beams,and proposed a way for further improvement of Airy beam machining technology and variety of bending structures. |
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